With the growing demand for semiconductors around the world, inquiries and requests from customers related to foreign matter analysis has been increasing recently. Today, we would like to introduce various […]
Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The employed techniques […]
Probing is increasingly utilized as a technique for the characterization of the local electrical properties of an integrated circuit, as well as the isolation of defects. Test structures and/or SRAM […]
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